Microlithography (Record no. 16838)

000 -LEADER
fixed length control field 00793nam a2200253Ia 4500
003 - CONTROL NUMBER IDENTIFIER
control field HQRS
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20190731040258.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 150617s2014 xx 000 0 eng d
040 ## - CATALOGING SOURCE
Original cataloging agency HQRS
Language of cataloging eng
Transcribing agency HQRS
041 ## - LANGUAGE CODE
Language code of original and/or intermediate translations of text eng
110 ## - MAIN ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element Central Electronics Engineering Research Institute(CEERI)
111 ## - MAIN ENTRY--MEETING NAME
Meeting name or jurisdiction name as entry element Proceedings of the first national symposium;
Location of meeting Pilani,
Date of meeting 11-12 Mar., 1986
245 ## - TITLE STATEMENT
Title Microlithography
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc New Delhi:
Name of publisher, distributor, etc Tata McGraw-Hill Publishing,
Date of publication, distribution, etc 1987
300 ## - PHYSICAL DESCRIPTION
Extent xi, 307p.;
Dimensions 23cm.
500 ## - GENERAL NOTE
General note Includes index
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Microlithography
General subdivision Congresses
Topical term or geographic name as entry element Microelectronics
General subdivision Congresses
Topical term or geographic name as entry element Lithography materials
General subdivision Congresses
Topical term or geographic name as entry element Microlithography
General subdivision Tools
Topical term or geographic name as entry element CEERI, CSIR
365 ## - TRADE PRICE
Price type code INR
Price note Comp.
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme
Item type English Book
Holdings
Permanent location Date last seen Not for loan Date acquired Source of classification or shelving scheme Koha item type Barcode Damaged status Lost status Withdrawn status Current location Full call number
CSIR-HQRS2015-09-07 1988-02-22 Conferences22096   CSIR-HQRS681.621.5:621.38(540) M7

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