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Fundamentals of semiconductor fabrication

by May, Gary S; Sze, Simon M.
Type: materialTypeLabelBookPublisher: Singapore: John Wiley, 2004Description: xii, 305p.: ill; 24cm.ISBN: 981253072X.Subject(s): Photolithography | Fabrication | Semiconductor devices | Semiconductor fabrication technology | Semiconductor industry
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Item type Location Call number Status Date due Barcode
English Book English Book
CSIR-HQRS
776:621.382 P4 (Browse shelf) Available 35010

Includes index

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