000			00793nam a2200253Ia 4500
003			HQRS
005			20190731040258.0
008			150617s2014 xx 000 0 eng d
040			_aHQRS _beng _cHQRS
041			_heng
110			_aCentral Electronics Engineering Research Institute(CEERI)
111			_aProceedings of the first national symposium; _cPilani, _d11-12 Mar., 1986
245			_aMicrolithography
260			_aNew Delhi: _bTata McGraw-Hill Publishing, _c1987
300			_axi, 307p.; _c23cm.
500			_aIncludes index
650			_aMicrolithography _xCongresses
650			_aMicroelectronics _xCongresses
650			_aLithography materials _xCongresses
650			_aMicrolithography _xTools
650			_aCEERI, CSIR
365			_aINR _eComp.
942			_2udc _cBK
999			_c16838 _d16838