| 000 | 00402nam a2200157Ia 4500 | ||
|---|---|---|---|
| 003 | HQRS | ||
| 005 | 20180128072553.0 | ||
| 008 | 170117s2017 xx 000 0 eng d | ||
| 040 |
_aHQRS _beng _cHQRS |
||
| 041 | _heng | ||
| 110 | _aCSIO, Chandigarh | ||
| 245 |
_aAutomatic wafer prober- _bmeeting the challenge in micropositioning |
||
| 260 |
_aChandigarh: _bCSIO |
||
| 365 | _bcomp. | ||
| 942 |
_cLP _2udc |
||
| 999 |
_c31114 _d31114 |
||