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Microlithography

by Central Electronics Engineering Research Institute(CEERI); Proceedings of the first national symposium; Pilani, 11-12 Mar., 1986.
Type: materialTypeLabelBookPublisher: New Delhi: Tata McGraw-Hill Publishing, 1987Description: xi, 307p.; 23cm.Subject(s): Microlithography -- Congresses | Microelectronics -- Congresses | Lithography materials -- Congresses | Microlithography -- Tools | CEERI, CSIR
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Item type Location Call number Status Date due Barcode
Conferences Conferences
CSIR-HQRS
681.621.5:621.38(540) M7 (Browse shelf) Available 22096

Includes index

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